Nanostructuring lithium niobate substrates by focused ion beam milling
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چکیده
منابع مشابه
Photonic crystal structures with ultrahigh aspect ratio in lithium niobate fabricated by focused ion beam milling
Lithium niobate LiNbO3, LN is an important material which is widely applied in fabricating photonic and acoustic devices. However, it is difficult to either wet etch or dry etch LN due to the material’s properties. Here, the authors report novel pattern fabrication based on LN using focused ion beam FIB milling. When an array of small holes is etched, a severe tapering problem is observed as is...
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Suspended waveguides have been widely applied to silicon-on-insulator structures because they are easily fabricated with processing techniques similar to those of integrated circuit design. However, it is difficult to fabricate such structures in lithium niobate, which is also a very important material for optoelectronics. One main challenge is the difficulty of etching lithium niobate. In this...
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